1. Vacuum resistance evaporation coating equipment

           ♦Preparation of high-quality functional films, steaming electrodes, etc.

           ♦The prepared film has excellent uniformity and repeatability.

           ♦Membrane thickness monitor is used to monitor and control evaporation rate, membrane thickness and other spectroscopic.

2. Magnetically controlled sputter coating equipment

           ♦For the preparation of single-layer films with DC and RF sputtering power supplies.

           ♦Sputtering metals, non-metallic, compounds and insulation materials.

           ♦It is mainly used for the preparation of metal oxide insulation.

3. Heat test equipment

           ♦Ultra-low vacuum environment, while the temperature can be adjusted in the range of 80K to 750K.

           ♦Provides extreme pressure and suitable temperature for low-dimensional micro-nanomaterial measurements.

           ♦Automated data acquisition can be performed with the meter.

4. Optical microscope

           ♦5x to 100x magnification for observation of low-dimensional, micron-size experimental samples.

5. Ultraviolet lithothing equipment

           ♦Ultraviolet light is irradiated to the surface of the substrate with photorespolature film, causing a chemical reaction of photorespolature in the exposure area.

           ♦The exposure area is removed by the dissolution of the development technology, so that the graphics on the mask plate are copied to the photorespographic film.

           ♦Use etching techniques to transfer graphics to the substation.

6. Glove box

           ♦The high purity inert gas is filled into the box and the water, oxygen, organic gas and other substances are filtered out.

           ♦Widely used to achieve waterless, oxygen-free, dust-free ultra-pure environment.

7. Drying box and ventilation cabinet

           ♦Dry the sample.